Alignment adjustment equipment , library equipment and alignment adjustment method

摘要

PROBLEM TO BE SOLVED: To enable stable handling by automating alignment adjustment of a robot for carrying an object to be carried, such as a cartridge.;SOLUTION: In an alignment adjustment device, a library device or an alignment adjustment method, at least two robots (6, 8) for carrying an object (cartridge 4) to be carried onto a storage shelf (10) are provided. When abnormality of cell access occurs in a robot, the robot in an abnormal state of the access is changed to another robot to make access before measuring reference flags (18A, 18B, 18C), and when abnormality of cell access occurs in the plurality of robots, a target cell flag (19) is measured. Further, when an error occurs in the plurality of robots, the secular change of a cell side is determined to remeasure the target cell flag.;COPYRIGHT: (C)2013,JPO&INPIT