As the liquid raw materials are stored in babbling evaporation supply

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for bubbling vaporization and supply which can control the pick-up amount along with the change of the bubbling quantity.;SOLUTION: A liquid raw material L is stored in a closed raw material tank 10 in which a heat exchanger 11 is installed and at the same time an introduction pipe 8 is inserted into the tank and while a heat medium M at a prescribed temperature is circulated in the heat exchanger 11, a carrier gas C is introduced at a prescribed flow rate into the introduction pipe 8 to carry out bubbling of the liquid raw material L and thus a gas mixture (G+C) of the gas G vaporized by the bubbling and a carrier gas C is discharged out of a gas phase part of the raw material tank 10 and supplied. Preferably, a heat exchanger 14 is installed in the introduction pipe 8 and while a heat medium M at a prescribed temperature is circulated to the heat exchanger 11 in the raw material tank 10 and the heat exchanger 14 in the introduction pipe 8, the carrier gas C is introduced. Furthermore preferably, a raw material supplementing tube 15 is connected to the raw material tank 10 and at the same time, a heat exchanger 16 is installed in the supplementing tube 15 and while the heat medium M is circulated also to the heat exchanger 16, the liquid raw material L is supplemented.;COPYRIGHT: (C)2011,JPO&INPIT