Laser interferometer length measuring machine, processing equipment and parts manufacturing method using the same

摘要

PROBLEM TO BE SOLVED: To improve the accuracy of measurement by decreasing a correction error caused by an influence of refractive index distribution when a measurement output of a measurement interferometer is corrected by using a measurement output of a correction interferometer.;SOLUTION: A laser gauge interferometer 100 using the interference of laser light includes: the measurement interferometer 51 which generates the measurement output corresponding to the displacement of a moving member 33; and the correction interferometer 52 which generates the measurement output corresponding to a change in a refractive index of air at a reference interval of a constant distance. An arithmetic processing device 60 computes a measurement target displacement amount in which the influence of the change in refractive index of air is corrected. Correction laser light irradiated from the correction interferometer 52 passes through the measurement interferometer 51 and travels on the same optical path as an optical path of correction laser light emitted from the measurement interferometer 51 to become interference light corresponding to a change in the refractive index of air through which the measurement laser light passes, and then enters the arithmetic processing device 60.;COPYRIGHT: (C)2011,JPO&INPIT