The stage which mounts

摘要

PROBLEM TO BE SOLVED: To provide a coating device which can suppress the influence of a guard member on the quantity of heat of a substrate even if the guard member and the substrate come close to each other for a fixed time, thereby suppressing generation of unevenness in a coating film.;SOLUTION: The coating device includes a stage for mounting the substrate, a coating unit which discharges a coating liquid from a slit nozzle to form a coating film on the substrate mounted on the stage while moving relatively to the substrate, and a guard portion which is mounted closer to the coating direction side than the slit nozzle and along the longitudinal direction of the slit nozzle and protects the slit nozzle by being brought into contact with a collision object in advance of the slit nozzle. The guard portion has a closely facing portion, which comes close to and faces the substrate, across the longitudinal direction, and the closely facing portion is covered with a material having a thermal conductivity lower than that of a material forming the guard portion.;COPYRIGHT: (C)2012,JPO&INPIT