3-axis angular velocity detection oscillator, 3-axis angular velocity detection device and 3-axis angular velocity detection system

摘要

PPROBLEM TO BE SOLVED: To provide a three-axis angular velocity detection vibrator, a three-axis angular velocity detector, and a three-axis angular velocity detection system capable of detecting an angular velocity in three-axis direction using a Coriolis force by one vibrator. PSOLUTION: The three-axis angular velocity detection vibrator includes four vibration arms 11-14 disposed in a square shape and four detection arms 21-24 extending to diagonal directions from vertexes of the square shape and detects the strain of the shape of the detection arms 21-24 generated by the vibration of the four vibration arms 11-14 to detect a three-axis angular velocity added to the four vibration arms 11-14. When the vibration arms are rotated around z-axis as a rotation axis, the strain of the shape of the detection arms 21-24 generated by a Coriolis force acting in x-y direction vertical to z-axis direction is detected. When the vibration arms 11-14 are rotated around an x(y) axis direction as the rotation axis, the strain of the shape of the detection arms 21-24 generated by a Coriolis force acting in z-axis direction is detected. PCOPYRIGHT: (C)2011,JPO&INPIT