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LSI varieties determining apparatus LSI varieties determining method, and LSI varieties determining program

机译:LSI品种确定装置LSI品种确定方法和LSI品种确定程序

摘要

PROBLEM TO BE SOLVED: To determine a suitable type matched with each intermediate product and to improve yield in LSI manufacturing by estimating the transistor performance of each intermediate product on the way of LSI manufacturing.;SOLUTION: In the manufacturing of a structured ASIC, an intermediate product is manufactured on which a transistor layer or a transistor layer and a metal 1 layer are formed, and then a transistor speed in each intermediate product is measured and the maximum delay estimation value of the transistor speed is calculated by using the measured result and statistic data related to the transistor speed. Then, the type of the structured ASIC is determined from an LSI type list on the basis of the calculated result.;COPYRIGHT: (C)2008,JPO&INPIT
机译:要解决的问题:通过评估LSI制造过程中的每个中间产品的晶体管性能,确定与每种中间产品匹配的合适类型并提高LSI制造中的成品率;解决方案:在结构化ASIC的制造中,制造中间产品,在其上形成晶体管层或晶体管层以及金属1层,然后测量每个中间产品中的晶体管速度,并使用测量结果计算出晶体管速度的最大延迟估计值,并与晶体管速度有关的统计数据。然后,根据计算结果从LSI类型列表中确定结构化ASIC的类型。版权所有:(C)2008,JPO&INPIT

著录项

  • 公开/公告号JP5395321B2

    专利类型

  • 公开/公告日2014-01-22

    原文格式PDF

  • 申请/专利权人 富士通株式会社;

    申请/专利号JP20060229266

  • 发明设计人 金澤 裕治;

    申请日2006-08-25

  • 分类号H01L21/66;G01R31/26;G05B19/418;H01L21/82;H01L27/118;H01L21/822;H01L27/04;

  • 国家 JP

  • 入库时间 2022-08-21 16:12:28

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