Spectroscopic optical system of DUV-UV bands and spectral measurement device using the same

摘要

PROBLEM TO BE SOLVED: To provide a spectroscopic optical system that enables vertical illumination by an optical system only using refractive lenses and performs color correction of wide band of a DUV-UV (190 to 400 nm) range, and to provide a spectrometer.;SOLUTION: The spectroscopic optical system includes a light source 100, a turn-back mirror 110, a field stop 120, an object-side condenser lens system 130 for collecting light on a specimen, an image-side condenser lens system 140 provided on an imaging face of the object-side condenser lens system, and a spectroscope 150 for spectrally diffracting regular reflected light from the specimen. Each of the object-side condenser lens system 130 and the image-side condenser lens system 140 is a spectroscopic optical system formed of only refractive lenses enabling vertical illumination in which color correction is performed in a wide band having a wavelength of 190 to 400 nm. A working distance (WD) of the lens is set to be not longer than a predetermined distance. A distance D between respective cemented lenses is set to be not shorter than a predetermined distance.;COPYRIGHT: (C)2010,JPO&INPIT