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Area determining device, observation device or test equipment, observation method or inspection method using the area determination method and area determination method
Area determining device, observation device or test equipment, observation method or inspection method using the area determination method and area determination method
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机译:区域确定装置,观察装置或检查设备,使用该区域确定方法和区域确定方法的观察方法或检查方法
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摘要
A region-of-interest determination apparatus includes: a calculation unit and a region determination unit. The calculation unit calculates a degree of a defect based on at least a plurality of kinds of defect attribute information regarding defect data. The defect data includes an image corresponding to a defect position detected on a specimen by inspection thereof or an image corresponding to a defect position predicted to be likely to develop a defect on the specimen, where both images are obtained by imaging. The region determination unit extracts the defect data of which the degree is higher than a predetermined level, and determines the region to be observed or inspected on the specimen based on the extracted defect data.
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