Compound surface roughness standard piece

摘要

PROBLEM TO BE SOLVED: To provide a roughness standard piece capable of calibrating and checking easily a plurality of kinds.;SOLUTION: A plurality of measuring domains 14, 16 are formed continuously or mutually at an interval on the surface of one blank 12. Each groove pattern of the measuring domains 14, 16 has a sine wave shape having the same amplitude in the depth direction, and 2-5 kinds of measuring domains 14, 16 are carried, among groove patterns wherein each wavelength in the measuring direction is 2.5 mm, 0.8 mm. 0.25 mm. 0.08 mm. and 0.025 mm, respectively. The wavelength in the measuring direction may be set to be changed linearly to a distance, or changed so as to have a relation of a logarithmic function. Otherwise, the plurality of measuring domains 14, 16 may have respectively a groove pattern linking a sine wave shape, a triangular wave shape and an arc, and these may be arranged substantially across a flat domain.;COPYRIGHT: (C)2011,JPO&INPIT