As from the deflection control circuit of the diagnostic mannered null charged particle beam drawing device of the DAC amplifier

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam drawing device and a method of diagnosing a DAC (Digital Analog Converter) amplifier unit of the charged particle beam drawing device, which can diagnose dynamic characteristics of the DAC amplifier unit.;SOLUTION: Digital data for circuit diagnosis is transmitted from a position deflection control circuit 230 of the charged particle beam drawing device to the DAC amplifier unit 232 at a speed substantially equal to the drawing speed of a product reticle, and stored in a maintenance memory 231. Digital data output from a digital portion 233 of the DAC amplifier unit 232 according to the digital data is stored in a maintenance memory 238. A maintenance clock generator 239 generates a clock signal to read the digital data stored in the maintenance memories 231 and 238. The read digital data are compared, bit by bit, to diagnose the digital portion 233.;COPYRIGHT: (C)2010,JPO&INPIT