On the aforementioned foundation and multiple positions and the aforementioned foundation which

摘要

PROBLEM TO BE SOLVED: To provide a drift measuring method detecting a beam drift in a time shorter than in the prior art, a charged particle beam drawing method, and a charged particle beam drawing apparatus.;SOLUTION: A detector 32 detects, in the form of a current value, reflected electrons generated when an electron beam 54 is irradiated onto a reference mark made of a material different in reflectivity from an underlying material, A signal from the detector 32 is amplified by a detector 33 and converted to a digital signal by an A/D converter 34. The digital signal is averaged by a control computer 19, and then used in a drawing data corrector 31 for drift correction.;COPYRIGHT: (C)2011,JPO&INPIT