Appearance survey instrument, surface analysis device, and appearance inspection method

摘要

P To detect a defect of a disk-shaped article to be inspected with high accuracy. PSOLUTION: An imaging means 30 takes images of a top face of the disk-shaped article to be inspected and as well as a side face of the same from six directions through a reflection means 20. A bottom edge detection means 81 detects a bottom edge of the article to be inspected based ON a luminance difference from the images of the article to be inspected taken by the imaging means 30, and outputs an observed edge shape. A tilt angle and direction calculation means 82 calculates an attitude of the article to be inspected from the observed edge shape. A theoretical edge shape calculation means 83 calculates a theoretical edge shape which should be projected in each direction, from the attitude of the article to be inspected, the radius of the article to be inspected and the angle from which the side face of the article to be inspected is observed. A defect detection means 84 compares the theoretical edge shape with the observed edge shape, and from a difference found by the comparison and detects a defect of the article to be inspected. PCOPYRIGHT: (C)2011 and JPO& INPIT