Low being the filling up container which has the evaporation supply methodological null carry Argos inlet and

摘要

PROBLEM TO BE SOLVED: To provide a filling vessel in which raw materials are substantially saturated into a carrier gas with high efficiency, and which solves various problems, e.g., that the raw materials are stuck to the inner wall of the vessel and a delivery tube by the channeling of the carrier gas saturated with the raw materials and droplets by destruction at a liquid face and can be adopted even to a low melting point compound having a relatively high viscosity.;SOLUTION: The filling vessel comprises a carrier gas introduction port and a derivation port, and includes a solid filler and a low melting point compound.;COPYRIGHT: (C)2010,JPO&INPIT