In the picture compilation method of drawing up the filter picture in order to remove false defect the record medium which records the program in order to make picture compilation method, baseplate inspection method

摘要

An image creation method of creating a filter image for removing a pseudo defect to inspect presence/absence of a defect on a substrate includes a filter image creation step of creating the filter image by replacing a picture element value of any one of picture elements located on a circumference of a circle about a center position of a registered image with a maximum value of picture element values of a plurality of picture elements selected from among the picture elements located on the circumference.