Inspection data management system and inspection data management method

摘要

PROBLEM TO BE SOLVED: To provide a system and method for management of inspection data for performing effective inspections while suppressing the man-hour of measurement in a manufacturing process with respect to a product in which the quality is affected by the combination of a plurality of manufacturing processes.;SOLUTION: The system for management of the inspection data manages the inspection data of a device manufactured on the same base material through a plurality of manufacturing processes and inspection processes. The system includes: an inspection information memory device for storing a standard model for showing the tendency of the measurement data of the device on the base material that is predetermined for each inspection process and a position to be inspected corresponding to the inspection data on the base material capable of distinguishing the standard model; and a standard model distinguishing section for distinguishing the standard model for each base material on the basis of the measured inspection data at the position to be inspected.;COPYRIGHT: (C)2010,JPO&INPIT