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Substrate surface temperature control equipment and manner inside process chamber
Substrate surface temperature control equipment and manner inside process chamber
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机译:基板表面温度控制设备及处理室内的方式
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摘要
The invention relates to a method of controlling the surface temperature of a substrate (9) resting on a substrate holder (2) borne by a substrate holder support (1) on a dynamic gas cushion (8) formed by a gas stream in a process chamber (12) of a CVD reactor, wherein heat is introduced into the substrate (9) at least partly by thermal conduction via the gas cushion. To reduce lateral deviations of the surface temperature of a substrate from a mean, it is proposed that the gas stream forming the gas cushion (8) be formed by two or more gases (17, 18) having different specific thermal conductivities and the composition be varied as a function of a measured substrate temperature.
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