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Vacuum Ultraviolet Photon Source, Ionization Apparatus, and Related Methods
Vacuum Ultraviolet Photon Source, Ionization Apparatus, and Related Methods
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机译:真空紫外光子源,电离装置及相关方法
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摘要
A vacuum ultraviolet (VUV) photon source includes a body, a VUV window, electrodes disposed on the body outside an interior thereof, and a dielectric barrier between the electrodes. A method for generating VUV photons includes generating a dielectric barrier discharge (DBD) in an interior of a photon source by applying a periodic voltage between a first electrode and a second electrode separated by a dielectric barrier, wherein the DBD produces excimers from a gas in a gap between the electrodes, and transmitting VUV photons through a window of the photon source.
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