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Multi-Axis Chip-Scale MEMS Inertial Measurement Unit (IMU) Based on Frequency Modulation
Multi-Axis Chip-Scale MEMS Inertial Measurement Unit (IMU) Based on Frequency Modulation
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机译:基于调频的多轴芯片级MEMS惯性测量单元(IMU)
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摘要
A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, in put rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.
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