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MICRO ELECTRO MECHANICAL SYSTEM CATALYTIC COMBUSTIBLE GAS SENSOR USING POROUS MEMBRANE EMBEDDED MICRO-HEATER
MICRO ELECTRO MECHANICAL SYSTEM CATALYTIC COMBUSTIBLE GAS SENSOR USING POROUS MEMBRANE EMBEDDED MICRO-HEATER
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机译:多孔膜嵌入式微加热器的微机电系统催化可燃气体
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摘要
Provided is a catalytic combustible gas sensor using a porous membrane embedded micro-heater and a micro electro mechanical system (MEMS) technology. The present disclosure provides a gas sensor that is structurally, mechanically, and electrically stable, and has a simple device fabrication process in a MEMS catalytic combustible gas sensor that is miniaturized and also consumes a significantly small amount of power by puncturing a plurality of holes in membranes, a heating resistor, and a sensing electrode, by etching and thereby thermally isolating a substrate by a predetermined thickness through the plurality of holes, and by including a sensing structure formed using a sensing material and a compensation structure formed using a compensation material.
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