MEMS TYPE CATALYTIC COMBUSTION TYPE GAS SENSOR USING MICRO-HEATER EMBEDDED WITH POROUS MEMBRANE

摘要

The present invention relates to a catalytic combustion type gas sensor using a micro-electro mechanical system (MEMS) and a micro-heater embedded with a porous membrane. The catalytic combustion type gas sensor includes a detecting structure made of a detecting material and a compensating structure made of a compensating material and thermally insulates by etching a substrate at a predetermined thickness through multiple holes bored on membranes, heating resistor, and sensing electrode. Therefore, the MEMS type catalytic combustion type gas sensor which is subminiature and has remarkably reduced power consumption can be structurally, mechanically, and electrically stable and easily perform an element producing process.;COPYRIGHT KIPO 2014