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Surface roughness for improved vacuum pressure for efficient media hold-down performance
Surface roughness for improved vacuum pressure for efficient media hold-down performance
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机译:表面粗糙度可提高真空压力,以实现有效的介质压紧性能
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摘要
Provided are vacuum transport systems, methods of making them and methods of transporting one or more objects. In accordance with various embodiments, there is a vacuum transport system including a vacuum plenum and one or more transport members configured to rotate around the vacuum plenum and wherein at least one of the one or more transport members can include a substrate, the substrate including a plurality of holes extending from a first side proximate to the vacuum plenum to a second side proximate to an object, wherein a surface of the second side comprises a textured surface having an average roughness Ra of about 2 μm to about 100 μm.
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