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Surface roughness for improved vacuum pressure for efficient media hold-down performance

机译:表面粗糙度可提高真空压力,以实现有效的介质压紧性能

摘要

Provided are vacuum transport systems, methods of making them and methods of transporting one or more objects. In accordance with various embodiments, there is a vacuum transport system including a vacuum plenum and one or more transport members configured to rotate around the vacuum plenum and wherein at least one of the one or more transport members can include a substrate, the substrate including a plurality of holes extending from a first side proximate to the vacuum plenum to a second side proximate to an object, wherein a surface of the second side comprises a textured surface having an average roughness Ra of about 2 μm to about 100 μm.
机译:提供了真空输送系统,其制造方法以及输送一个或多个物体的方法。根据各种实施例,存在一种真空输送系统,该真空输送系统包括真空室和构造成绕真空室旋转的一个或多个输送构件,并且其中一个或多个输送构件中的至少一个可包括基板,该基板包括一个或多个。从邻近真空室的第一侧延伸到邻近物体的第二侧的多个孔,其中第二侧的表面包括具有约2μm至约100μm的平均粗糙度Ra的纹理化表面。

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