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Thermal nanoimprint lithography mould, process for producing it, and thermal nanoimprint process employing it
Thermal nanoimprint lithography mould, process for producing it, and thermal nanoimprint process employing it
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机译:热纳米压印光刻模具,其制造方法以及使用该模具的热纳米压印工艺
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摘要
A heating mould for thermal nanoimprint lithography, a process of producing the heating mould, and a process for producing a nanostructured substrate which include the heating mould. The heating mould includes the heating mould. The heating mould includes a substrate having a first principal surface and a second principal surface, and a through-cavity extending from a first orifice in the first principal surface up to a second orifice in the second principal surface. The mould also includes a heating layer, an electrically and thermally insulating layer which covers the heating layer and, at least partially, imprint patterns, and leads for supplying an electric current to the heating layer.
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