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Micro structure, micro actuators, method of fabricating micro structure and micro actuators
Micro structure, micro actuators, method of fabricating micro structure and micro actuators
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机译:微型结构,微型致动器,制造微型结构的方法和微型致动器
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摘要
A method for fabricating a micro-structure is provided, which can simply and easily fabricate the micro-structure by a batch process of directly forming a highly aligned nano-material array on a micro-structure to be used as an adhesive material during plastic deformation of the micro-structure without the use of existing complicated fabrication process.
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