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MEMS hierarchically-dimensioned optical mirrors and methods for manufacture thereof
MEMS hierarchically-dimensioned optical mirrors and methods for manufacture thereof
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机译:MEMS分层尺寸的光学镜及其制造方法
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摘要
MEMS hierarchically-dimensioned optical mirrors, each comprising a substrate, a plurality of spacers disposed on the substrate, a plurality of piezoelectric/electrostrictive cantilever microactuators disposed on the plurality of spacers, and a monolithic deformable mirror or a segmented mirror array disposed on the plurality of the cantilever assemblies, having significantly improved overall device performances owing to the use of the cantilever microactuators based on relaxor ferroelectric single crystal materials and/or other piezoelectric/electrostrictive materials, are disclosed along with methods of manufacturing such devices.
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