首页>
外国专利>
RF-driven ion source with a back-streaming electron dump
RF-driven ion source with a back-streaming electron dump
展开▼
机译:具有反向电子转储的RF驱动离子源
展开▼
页面导航
摘要
著录项
相似文献
摘要
A novel ion source is described having an improved lifetime. The ion source, in one embodiment, is a proton source, including an external RF antenna mounted to an RF window. To prevent backstreaming electrons formed in the beam column from striking the RF window, a back streaming electron dump is provided, which in one embodiment is formed of a cylindrical tube, open at one end to the ion source chamber and capped at its other end by a metal plug. The plug, maintained at the same electrical potential as the source, captures these backstreaming electrons, and thus prevents localized heating of the window, which due to said heating, might otherwise cause window damage.
展开▼