Method for manufacturing microstructure using self-assembly of amphiphilic polymer

摘要

According to one embodiment, a method for manufacturing a microstructure includes forming a guide film on a patterning material, forming a cured film, forming a mask member, and performing processing of the patterning material using the mask member as a mask. An opening is made in the guide film. An upper surface of the guide film is hydrophilic, a side surface of the opening is hydrophobic. The forming the cured film includes applying a solution to cover the patterning material and the guide film, separating the solution into a hydrophobic block and a hydrophilic block, and curing the solution. The solution contains an amphiphilic polymer having a hydrophobic portion and a hydrophilic portion. A length of the hydrophobic portion is longer than a length of the hydrophilic portion. The mask member is formed by removing the hydrophilic block from the cured film.