首页>
外国专利>
SOLUTIONS FOR RETARGETING INTEGRATED CIRCUIT LAYOUTS BASED ON DIFFRACTION PATTERN ANALYSIS
SOLUTIONS FOR RETARGETING INTEGRATED CIRCUIT LAYOUTS BASED ON DIFFRACTION PATTERN ANALYSIS
展开▼
机译:基于衍射图谱分析的综合电路布局重新定位解决方案
展开▼
页面导航
摘要
著录项
相似文献
摘要
A computer-implemented method for retargeting an Integrated Circuit (IC) layout is disclosed. In one embodiment, the method includes generating a diffraction pattern for the IC layout including a set of diffraction-orders, the IC layout including a set of features defined by a set of target edges, analyzing the diffraction pattern with a merit function to estimate printability of the IC layout, monitoring a change in value of the merit function as a position of at least one of the set of target edges is adjusted across a range, and retargeting the set of target edges based on the monitoring of the merit function.
展开▼