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Flexural vibrating reed, flexural vibrator, and piezoelectric device

机译:弯曲振动片,弯曲振动器和压电装置

摘要

Deterioration of the Q value caused by the thermoelastic effect is suppressed. Since a first depth of a first groove and a second depth of a second groove are smaller than a distance between a surface including a third surface and a surface including a fourth surface, the first and second grooves do not penetrate between the surface including the third surface and the surface including the fourth surface. In addition, the sum of the first depth of the first groove and the second depth of the second groove is greater than the distance between the third and fourth surfaces, a heat transfer path between a first expandable portion (the first surface) and a second expandable portion (the second surface) cannot be formed as a straight line. As such, the heat transfer path between the first expandable portion (the first surface) and a second expandable portion (the second surface) is made to detour to the first and second grooves and and thus be lengthened.
机译:由热弹性效应引起的Q值的恶化得到抑制。由于第一凹槽的第一深度和第二凹槽的第二深度小于包括第三表面的表面与包括第四表面的表面之间的距离,所以第一凹槽和第二凹槽不穿透包括第三表面的表面之间。表面和包括第四表面的表面。另外,第一凹槽的第一深度和第二凹槽的第二深度之和大于第三和第四表面之间的距离,第一可扩张部分(第一表面)和第二可扩张部分之间的传热路径。可扩展部分(第二表面)不能形成为直线。这样,使第一可扩展部分(第一表面)和第二可扩展部分(第二表面)之间的热传递路径de回第一凹槽和第二凹槽,并因此被延长。

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