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PIEZOELECTRIC VIBRATING-REED AND MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATING-REED, PIEZOELECTRIC VIBRATOR, OSCILLATOR WITH PIEZOELECTRIC VIBRATOR, ELECTRONIC DEVICE, AND RADIO CLOCK
PIEZOELECTRIC VIBRATING-REED AND MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATING-REED, PIEZOELECTRIC VIBRATOR, OSCILLATOR WITH PIEZOELECTRIC VIBRATOR, ELECTRONIC DEVICE, AND RADIO CLOCK
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机译:压电振动片的压电振动和制造方法,压电振动器,带有压电振动器的振荡器,电子设备和无线电时钟
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摘要
PROBLEM TO BE SOLVED: To provide a piezoelectric vibrating-reed and its manufacturing method, a piezoelectric vibrator, an oscillator, an electronic device, and a radio clock which can perform effective frequency adjustment, and at the same time, prevent variation of resonant frequency caused from effect of oxidation after the adjustment, and can be efficiently manufactured.;SOLUTION: The piezoelectric vibrating-reed 1 prepares an external electrode connection unit 7, an excitation electrode 5, and a fine adjustment unit 9 on a crystal-reed 1a, and is manufactured by a manufacturing method which prepares: an external shape forming process which forms an external shape of the crystal-reed 1a; a chromium film forming process which forms a chromium film 20 on a surface of the crystal-reed 1a; a chromium film pattern forming process which carries out patterning of the chromium film 20 in positions of the external electrode connection unit 7, the excitation electrode 5, and the fine adjustment unit 9; a protection film forming process which makes a protection film 11 on a surface of the chromium films 20 formed in positions of the fine adjustment unit 9; and a frequency fine adjustment process which irradiates a laser light at the fine adjustment unit 9, adjusts weight of the fine adjustment unit 9, and establishes the crystal-reed 1a in a predetermined resonant frequency.;COPYRIGHT: (C)2008,JPO&INPIT
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