首页> 外国专利> PIEZOELECTRIC VIBRATING-REED AND MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATING-REED, PIEZOELECTRIC VIBRATOR, OSCILLATOR WITH PIEZOELECTRIC VIBRATOR, ELECTRONIC DEVICE, AND RADIO CLOCK

PIEZOELECTRIC VIBRATING-REED AND MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATING-REED, PIEZOELECTRIC VIBRATOR, OSCILLATOR WITH PIEZOELECTRIC VIBRATOR, ELECTRONIC DEVICE, AND RADIO CLOCK

机译:压电振动片的压电振动和制造方法,压电振动器,带有压电振动器的振荡器,电子设备和无线电时钟

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric vibrating-reed and its manufacturing method, a piezoelectric vibrator, an oscillator, an electronic device, and a radio clock which can perform effective frequency adjustment, and at the same time, prevent variation of resonant frequency caused from effect of oxidation after the adjustment, and can be efficiently manufactured.;SOLUTION: The piezoelectric vibrating-reed 1 prepares an external electrode connection unit 7, an excitation electrode 5, and a fine adjustment unit 9 on a crystal-reed 1a, and is manufactured by a manufacturing method which prepares: an external shape forming process which forms an external shape of the crystal-reed 1a; a chromium film forming process which forms a chromium film 20 on a surface of the crystal-reed 1a; a chromium film pattern forming process which carries out patterning of the chromium film 20 in positions of the external electrode connection unit 7, the excitation electrode 5, and the fine adjustment unit 9; a protection film forming process which makes a protection film 11 on a surface of the chromium films 20 formed in positions of the fine adjustment unit 9; and a frequency fine adjustment process which irradiates a laser light at the fine adjustment unit 9, adjusts weight of the fine adjustment unit 9, and establishes the crystal-reed 1a in a predetermined resonant frequency.;COPYRIGHT: (C)2008,JPO&INPIT
机译:解决的问题:提供一种压电振动片及其制造方法,压电振动器,振荡器,电子设备和无线电时钟,它们可以执行有效的频率调整,并且同时防止谐振频率的变化。解决方案:压电振动片1在晶体片1a上准备了外部电极连接单元7,激励电极5和微调单元9,并通过制造方法制造,该制造方法准备:形成晶体簧片1a的外形的外形形成工艺;铬膜形成工序,其在结晶片1a的表面上形成铬膜20。铬膜图案形成工序,其在外部电极连接部7,激振电极5以及微调部9的位置对铬膜20进行构图。保护膜形成工序,在形成于微调单元9的位置的铬膜20的表面上形成保护膜11。频率微调处理,向微调单元9照射激光,调整微调单元9的重量,以规定的共振频率形成晶体簧片1a。版权所有:(C)2008,日本特许厅&INPIT

著录项

  • 公开/公告号JP2008028590A

    专利类型

  • 公开/公告日2008-02-07

    原文格式PDF

  • 申请/专利权人 SEIKO INSTRUMENTS INC;

    申请/专利号JP20060197609

  • 申请日2006-07-20

  • 分类号H03H3/04;H03H9/02;H03H9/19;H03B5/32;

  • 国家 JP

  • 入库时间 2022-08-21 20:19:46

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