Methodology for evaluation of electrical characteristics of carbon nanotubes

摘要

The present disclosure relates to a structure comprising1. an electrically conductive substrate having carbon nanotubes grown thereon;2. a cured polymeric fill matrix comprising at least one latent photoacid generator embedded around the carbon nanotubes but allowing tips of the carbon nanotubes to be exposed;3. a layer of patterned and cured photosensitive dielectric material on the cured polymeric fill matrix, wherein tips of the carbon nanotubes are exposed within the patterns; and4. an electrically conductive material filled into the interconnect pattern and in contact with the exposed tips of the carbon nanotubes;and to methods of making the structure and using the structure to measure the electrical characteristics of carbon nanotubes.