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Precision laser ablation

机译:精密激光烧蚀

摘要

Methods and systems for precisely removing selected layers of materials from a multi-layer work piece using laser ablation are disclosed. Precise removal of one or more selected layers of materials of a work piece may be performed by irradiating at least one location on a multi-layer work piece with a laser beam, ablating material at the at least one location, detecting one or more characteristics of the material ablated at the at least one location and analyzing the one or more characteristics to identify a change in at least one of the one or more characteristics that indicates a change in the type of material being ablated. Related systems are also described.
机译:公开了用于使用激光烧蚀从多层工件中精确地去除所选材料层的方法和系统。可以通过用激光束照射多层工件上的至少一个位置,在至少一个位置处烧蚀材料,检测工件的一个或多个特征来执行工件的一层或多层所选材料的精确去除。所述材料在所述至少一个位置处被烧蚀,并且分析所述一个或多个特性以识别所述一个或多个特性中的至少一个的变化,所述变化指示被烧蚀的材料类型的变化。还描述了相关系统。

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