首页>
外国专利>
Inline defect analysis for sampling and SPC
Inline defect analysis for sampling and SPC
展开▼
机译:在线缺陷分析以进行采样和SPC
展开▼
页面导航
摘要
著录项
相似文献
摘要
In one embodiment, an inline defect analysis method includes receiving geometric characteristics of individual defects and design data corresponding to the individual defects, determining which of the individual defects are likely to be nuisance defects using the geometric characteristics and the corresponding design data, and refraining from sampling the defects that are likely to be nuisance defects.
展开▼