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MOS device for eliminating floating body effects and self-heating effects

机译:消除浮体效应和自热效应的MOS器件

摘要

A SOI MOS device for eliminating floating body effects and self-heating effects are disclosed. The device includes a connective layer coupling the active gate channel to the Si substrate. The connective layer provides electrical and thermal passages during device operation, which could eliminate floating body effects and self-heating effects. An example of a MOS device having a SiGe connector between a Si active channel and a Si substrate is disclosed in detail and a manufacturing process is provided.
机译:公开了一种用于消除浮体效应和自热效应的SOI MOS器件。该器件包括将有源栅沟道耦合到Si衬底的连接层。连接层在设备运行期间提供了电气和热通道,可以消除浮体效应和自热效应。详细公开了在Si有源沟道和Si衬底之间具有SiGe连接器的MOS器件的示例,并且提供了一种制造工艺。

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