Vibration power generator and vibration power generation device, and communication device and electronic equipment with vibration power generation device

摘要

A vibration power generator is provided that increases output power by improving the electrostatic capacitance when the area of the overlap between electret electrodes and counter electrodes is maximum while having the function of limiting the spread of the electric field from the electret electrodes. The vibration power generator is provided with: a first substrate and a second substrate configured so as to be relatively movable while keeping a condition of being separated so as to be opposed to each other; a first electrode formed on the first substrate; a second electrode formed on the second substrate so as to be opposed to the first electrode; and a third electrode formed in a region different from the first electrode on the first substrate, either one of the first electrode and the second electrode includes a film holding a charge, and when an overlap between the first electrode and the second electrode is minimum, the third electrode is grounded, and when the overlap between the first electrode and the second electrode is maximum, the third electrode is open.