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Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber
Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber
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机译:水反应性Al复合材料,水反应性Al膜,Al膜的制造方法以及成膜室的构成部件
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摘要
Herein disclosed are a water-reactive Al composite material which comprises 4NAI or 5NAI containing added In in an amount ranging from 2 to 5% by mass; and added Si and Si as an impurity in a total amount ranging from 0.04 to 0.6% by mass on the basis of the amount of Al; a thermally sprayed Al film prepared using this material; a method for the production of such an Al film; and a constituent member for a film-forming chamber, which is provided with this thermally sprayed Al film on the surface thereof.
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