Miniature cell array structure and manufacturing method of miniaturized composite component using such a miniature cell array structure

摘要

A method of manufacturing a cell array structure includes a first step of laminating a deformable layer capable of causing plastic deformation on a substrate, the substrate being formed with plural, mutually separated depressions on a top surface thereof, such that the deformable layer forms a mutually isolated space in each of the plural depressions; and a second step of extending the space in each of the plural depressions by causing plastic deformation in the deformable layer, such that there are formed plural columnar cells respectively in correspondence to the plural depressions.