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Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer
Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer
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机译:生成用于标准参考管芯检查的管芯中使用的标准参考管芯的方法和检查晶片的方法
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摘要
Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer are provided. One computer-implemented method for generating a standard reference die for use in a die to standard reference die inspection includes acquiring output of an inspection system for a centrally located die on a wafer and one or more dies located on the wafer. The method also includes combining the output for the centrally located die and the one or more dies based on within die positions of the output. In addition, the method includes generating the standard reference die based on results of the combining step.
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