IMPROVED MICRO-MACHINED SUSPENSION PLATE WITH INTEGRAL PROOF MASS FOR USE IN A SEISMOMETER OR OTHER DEVICE

摘要

An accelerometer or a seismometer (1) using an in-plane suspension geometryhaving a suspension plate (2, 201) and at least one fixed capacitive plate (3a-b). The suspension plate is formed from a single piece and includes anexternal frame, a pair of flexural elements (6, 202), and an integrated proofmass (201) between the flexures. The flexural elements (202) allow the proofmass to move in the sensitive direction in the plane of suspension whilerestricting movement in all off-axis directions. Off-axis motion of the proofmass is minimized by the use of intermediate frames (204) disbursed within andbetween the flexural elements (202). Intermediate frames can include motionstops to prevent further relative motion during overload conditions. Thedevice can also include a dampening structure, such as a spring or gasstructure that includes a trapezoidal piston and corresponding cylinder, toprovide damping during non-powered states.