A MEM S-iunable source includes a short-cavity laser optimized for performance and reliability in SSOCT imaging systems, spectroscopic detection systems, and other types of detection and sensing systems. A MEMS-tunable short cavity laser with a large free spectral range cavity, fast tuning response and single transverse and longitudinal mode operation is disclosed. A MEMS-actuation mechanism including a stress- engineering silicon nitride membrane with multiple supporting struts enabling flat and wide frequency response is disclosed. The supports for low-ripple operation of the tunable source are also discussed.
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