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TECHNIQUES FOR PATTERNING MULTILAYER MAGNETIC MEMORY DEVICES USING ION IMPLANTATION
TECHNIQUES FOR PATTERNING MULTILAYER MAGNETIC MEMORY DEVICES USING ION IMPLANTATION
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机译:离子注入法刻画多层磁性存储器的技术
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摘要
A method of patterning a substrate includes providing a layer stack comprising a plurality of layers on a base portion of the substrate, where the layer stack includes an electrically conductive layer and a magnetic layer. The method further includes forming a first mask feature on an outer surface of the layer stack above a first protected region and a second mask feature on the outer surface of the layer stack above a second protected region, and directing ions towards the layer stack to magnetically isolate and electrically isolate the first protected region from the second protected region.
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