SPATIAL LIGHT MODULATOR FOR ACTUATING MICROELECTROMECHANICAL SYSTEMS (MEMS) STRUCTURES

摘要

A spatial light modulator is provided by positioning and repositioning micromirrors of a microelectromechanical system. The micromirrors are positioned by an actuator linked to the micromirrors by a frame. The actuator responds to a control signal having voltages that create electrical fields. The electrical fields provide forces that change the positions of the micromirrors in such a way that a light beam striking the micromirrors reflects as a modulated light beam.