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METHOD FOR FORMING AN ACOUSTIC MIRROR WITH REDUCED METAL LAYER ROUGHNESS AND RELATED STRUCTURE
METHOD FOR FORMING AN ACOUSTIC MIRROR WITH REDUCED METAL LAYER ROUGHNESS AND RELATED STRUCTURE
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机译:具有减小的金属层粗糙度和相关结构的声学镜的形成方法
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摘要
According to an exemplary embodiment, a method of forming a metal layer having reduced roughness includes a step of forming a seed layer over a dielectric layer. The method further includes a step of forming the metal layer over the seed layer. The seed layer causes a top surface of the metal layer to have reduced roughness. The seed layer and the metal layer can be formed in a same process chamber or in different process chambers. The dielectric layer, the seed layer, and the metal layer having reduced roughness can be utilized in an acoustic mirror structure.
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