SCHEDULE PREPARATION DEVICE, SUBSTRATE PROCESSING DEVICE, SCHEDULE PREPARATION PROGRAM, SCHEDULE PREPARATION METHOD, AND SUBSTRATE PROCESSING METHOD

摘要

Provided is a technique capable of preparing a time-efficient schedule when preparing a conveyance schedule for a plurality of substrates.A schedule preparation device according to the present invention determines whether or not a collective conveyance flow would allow conveyance to be completed earlier than a sequential conveyance flow in the preparation for a schedule when processing and conveying a plurality of substrates in a processing unit, and selectively adopts these types of conveyances according to the determination results. Of these types of conveyances, the sequential conveyance flow sequentially conveys each substrate for which the conveyance processing can be started to a prescribed conveyance destination, whereas the collective conveyance flow suspends the conveyance of a substrate that is ready to be conveyed until a subsequent substrate becomes ready to be conveyed, and conveys a plurality of substrates all together to the conveyance destination when the conveyance processing for the subsequent substrate can be started.