SCHEDULE PREPARATION DEVICE, SUBSTRATE PROCESSING DEVICE, SCHEDULE PREPARATION PROGRAM, SCHEDULE PREPARATION METHOD, AND SUBSTRATE PROCESSING METHOD

摘要

Provided is a technique capable of creating a schedule with good time efficiency in creating a schedule when a plurality of substrates are transported. The schedule creating apparatus of the present invention is configured to determine whether or not the batch take-out flow is faster than the sequential take-out flow in completing a schedule when a plurality of substrates are processed and processed by the processing unit, And selectively adopts them according to the result. Of these, the sequential carry-out flow is a process in which each substrate is transported to a predetermined destination in a descending order of time at which the transport process can be started, and the collective take-out flow is a process in which the substrate, The substrate is not conveyed until the time when the conveying process can be started and the plurality of substrates are conveyed to the conveying destination together when the conveying process of the succeeding substrate becomes possible.