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Capacitive micro-switch comprising a charge drain made up of directed nanotubes on the bottom electrode and method for manufacturing same
Capacitive micro-switch comprising a charge drain made up of directed nanotubes on the bottom electrode and method for manufacturing same
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机译:包括由底部电极上的定向纳米管组成的电荷漏极的电容式微动开关及其制造方法
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摘要
The micro-switch has an upper metallic membrane (45) and a radio frequency signal line (42) separated by gas or empty thickness. An electrical insulating layer (44) is located on the signal line. A charge drain (43) is constituted of conductor nanotubes e.g. carbon nanotubes, oriented to a surface of the signal line. The drain is surrounded by the electrical insulating layer, where the layer is made of dielectric material. An independent claim is also included for a method for fabricating a micro-switch.
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