METHOD OF AND APPARATUS FOR CALIBRATING THE PULSE ENERGY OF A LASER DEVICE USING A COHERENCE-OPTICAL INTERFEROMETRIC MEASURING APPARATUS

摘要

In a method for calibrating the pulse energy of a laser device (110) that provides pulsed working laser radiation, the working laser radiation is used to perform a plurality of test ablations, in particular multiple-pulse test ablations, on one or a plurality of test objects (180) with a different pulse energy in each case. The ablation depth of each of the test ablations is measured and an associated desired pulse energy is subsequently determined on the basis of the measured ablation depths and a predefined desired ablation depth and is set on the laser device. According to the invention, the ablation depths are measured by means of a coherence-optical interferometric measuring apparatus (130). The invention furthermore relates to a laser device in particular for carrying out the above method.