SILICON NANOWIRE CHIP FOR SIMULTANEOUSLY DETECTING MIRNAS AND PROTEIN MARKERS, DETECTING METHOD AND APPLICATION THEREOF

摘要

A silicon nanowire chip for simultaneous detection of miRNAs and protein markers, comprises at least a single-strand DNA probe and protein markers integrated arranged on a silicon nanowire array. The silicon nanowire chip includes: a semiconductor substrate, a silicon dioxide isolating layer, a polycrystalline silicon layer and a passivation layer. The preparation method of the silicon nanowire chip comprises the following steps: providing a semiconductor substrate, growing a silicon dioxide isolating layer on the semiconductor substrate, growing a polycrystalline silicon layer on the silicon dioxide isolating layer, patterning the polycrystalline silicon layer to form the silicon nanowire array, then forming the passivation layer on the formed nanowire array, and finally removing the passivation layer among nanowires in the silicon nanowire array. The operation method of the silicon nanowire chip comprises the steps of: detecting current values of silicon nanowires before and after sampling, accordingly calculating the resistance values before and after sampling, regarding the ratio of the resistance values as an effective parameter, obtaining standard curve of concentration of special miRNAs and protein markers, and acquiring concentration of miRNAs and protein markers in samples upon comparing the tested values with the standard curve. The silicon nanowires chip can detect miRNAs and protein markers simultaneously, and shows good sensitivity, easy integration, high throughput, high stability and antipolution.