X-ray CT system for measuring three dimensional shapes and measuring method of three dimensional shapes by X-ray CT system

摘要

The invention relates to an X-ray CT system for measuring three-dimensional shapes, while the X-ray system is capable of extracting three-dimensional shape information with high accuracy in consideration of beam hardening depending on a material and thickness of a specimen (8). The X-ray CT system includes an optical distance meter (12) and a CT image analyzing unit (10). The optical distance meter (12) measures an outer shape of the specimen (8) simultaneously with a measurement of projection data. The CT image analyzing unit (10) calculates a boundary threshold for the specimen (8) on the basis of a CT image and a measurement value of the outer shape.