Electronic sensor device for detecting chemical or biological species, microfluidic device with such a sensor device and method for producing the sensor device and method for producing the microfluidic device

摘要

The electronic sensor device (10) has a semiconductor-chip (30) manufactured from a semiconductor substrate, where the semiconductor-chip is formed for one or multiple functions. A sensor unit (40,40') is provided with an active sensor upper surface (42) and is formed to detect the chemical or biological species and to generate an electrical signal. A substrate (20) is provided with a substrate upper surface (22) and is made from a melt-moldable material. Independent claims are included for the following: (1) a micro-fluidic device with a polymer substrate; (2) a method for manufacturing an electronic sensor device; and (3) a method for manufacturing a micro-fluidic device.