Electronic sensor device for detecting chemical or biological species, microfluidic device with such a sensor device and method for producing the sensor device and method for producing the microfluidic device

摘要

An electronic sensor device (10) for detecting chemical or biological species (12, 12 '12' '), in particular ions, molecules, proteins, RNA molecules, DNA sequences, antigens, viruses, bacteria or cells, comprises at least one of semiconductor chip (30) fabricated for a semiconductor substrate (36) and configured for one or more functions selected from a group comprising: amplifying an electrical voltage, amplifying an electric current, amplifying or evaluating an electrical charge and amplifying or reading capacitance changes, at least one sensor direction (40, 40 ') having an active sensor surface (42), which is designed to be chemical or biological species (12, 12', 12 '') to detect and produce an electrical signal due to a characteristic interaction with the active sensor surface (42) which a is selected from the group consisting of an electric voltage, an electric current, an electric charge and a capacitance change, and a substrate (20) made of a melt-moldable material (26) having a substrate surface (22) containing at least a first substrate Area and at least one second area comprises, wherein in the at least one first area of the at least one semiconductor chip (30) is applied or at least partially embedded and in the at least one second area, the at least one sensor device (40, 40 ') applied or at least is partially embedded. Such an electronic sensor device (10) may be incorporated in a microfluidic device (100) for detecting chemical or biological species (12, 12 ', 12' ') that can be delivered to the device (100) in an analyte solution. A method for manufacturing an electronic sensor device (10) and a method for manufacturing a microfluidic device (100) are also disclosed.